WebThe reducibility of the metal incorporated MCM-41 samples was investigated by a hydrogen temperature programmed reduction (TPR) technique. CO chemisorption was performed to determine the metallic particle size and thereby investigate the metal anchoring effect. WebSep 15, 2024 · HARPSS™ process can be used to fabricate both yaw and pitch/roll high-frequency gyroscopes, but the yield and performance of high-frequency resonant pitch or roll gyroscopes are highly limited by quadrature errors. Therefore, implementing slanted electrode quadrature tuning technology in high-frequency pitch or roll gyroscopes is …
A HARPASS polysilicon vibrating ring gyroscope
WebApr 25, 2016 · ( b) Electrodes with ultra-narrow capacitive gaps (270 nm) created with the HARPSS process are used for electrostatic actuation and readout. HARPSS, high … WebApr 25, 2016 · Devices were fabricated using a modified version of the high-aspect ratio poly- and single-crystal silicon (HARPSS™) process flow 7, in combination with planar X/Y-axis gyroscopes 34 and tri-axial accelerometers 35 as part of a 6-degree-of-freedom system. Figure 7. SEM view ... tnh omega crane truck 4001492
Self-Aligned HARPSS Micromechanical Variable Capacitors
WebHarpSS is a Grand Harp application that features 46 strings with approximately 7 octaves! To play a halftone, touch the small ball that appears in the upper middle of the string on … WebJul 19, 2014 · single crystalline silicon” (HARPSS) fabrication process on silicon-on-insulator (SOI) substrates. Such resonators operate in their horizontal width extensional modes with quality factors in the range of 10000–100000. With their comparatively large electrode area and deep-submicrometer capacitive transduction WebThe HARPSS process for fabrication of nano-precision silicon electromechanical resonators Conference Paper Feb 2001 Seong Yoel No Farrokh Ayazi In this paper, radio frequency (RF) ultra-stiff... tn homeschool coop